Lithography Track For DUV and iline

The Instrument (Lithography Track for DUV and iLine) will be purchased as part of the QuantumDeltaNL program “National Cleanroom Infrastructure” - with the central aim to maintain and provide a coherent and accessible infrastructure for nano-technological research and innovation in the Netherlands. The Instrument will be part of the NanoLabTUe facility and will be installed inside the cleanroom of the department of Applied Physics and Science Education at TU/e. The main stakeholders are researchers from groups of the Applied Physics and Science Education department - the Electrical Engineering department - and the Hendrik Casimir Institute. This instrument will be used to fully automatically coat and develop wafers that are exposed by various tools of NanoLabTUe respectively: ASML DUV scanner - ASML iLine stepper - Heidelberg...