Litho Mask Aligner system

The purpose of the Tender is TNO's intention to enter a Contract with one (1) Contractor for the supply and delivery of one (1) Litho Mask Aligner tool - capable of full-automatic alignment and exposure of i-line photoresist layers on 6” InP wafers. Following the present Procurement Procedure - TNO intends to award a contract for the purchase of one Litho Mas Aligner tool as outlined in this Procurement Guide. In general terms - the contract involves: - The purchase of a Litho Mask Aligner tool - 24 months warranty including maintenance and services as denoted in series R-4000 (Annex A04); - (Critical) Design review - Factory Acceptance Test (FAT)1 - Commissioning on site and Site Acceptance Test1 - Delivery according to Incoterm®2020...