I-Line and polymer front-end Track

# Purpose of the Tender The purpose of the Tender is TNO's intention to enter a Contract with one (1) Contractor for the supply and delivery of one I-Line-Track system - herein after “equipment” - capable of full-automatic application of several relevant photoresist and polymer layers - for our I-Line lithography system. The system shall also be capable of full-automatic development of exposed wafers. The equipment shall be capable to be physically connected to the i-Line lithography system. This supply and service shall be performed in accordance with the requirements as set out in the Procurement Documents. # Doel van de aanbesteding Het doel van de aanbesteding is dat TNO een contract wil sluiten met één (1) aannemer voor de levering en installatie...