DUV photoresist coating & developer Track

The purpose of the Tender is TNO's intention to enter a Contract with one (1) Contractor for the supply and delivery of one Deep Ultra Violet Photoresist Coating Track system (herein after: equipment) - capable of full-automatic application of all relevant photoresist and anti-reflection layers - for our KrF lithography system. The system shall also be capable of full automatic development of exposed wafers. The equipment shall be capable to be physically connected to the DUV lithography system. This supply and service shall be performed in accordance with the requirements as set out in the Procurement Documents. Het doel van de aanbesteding is dat TNO een contract wil sluiten met één (1) aannemer voor de levering en installatie van één Deep Ultra...