11308 - Spray coater

The Cleanroom Baseline Lab (CBL) at the Technical University of Delft serves as a shared cleanroom facility - offering access to micro- and nanotechnology equipment for researchers - start-ups - PhD students - and other scholars for device fabrication. This contract aims to acquire a new resist spray coater system to replace the current one - which has reached the end of its service life. The primary objective is to procure a versatile - high-uniformity - and safe spray coater capable of covering samples ranging from 1 cm x 1 cm to 200 mm wafers with optical - laser-writer - and electron beam resists. The subject of this tender includes: • design - specification and manufacturing of the spray coater system in accordance with the requirements and other specifications indicated...