11059 - Refractory metals evaporator

The Kavli Nanolab (KN) at the Technical University of Delft operates as a shared cleanroom facility - providing access to nanotechnology equipment for researchers - start-up companies - PhD students - and other scholars for nano device fabrication. This contract aims to procure a new multi-user evaporation system to replace the existing one used for refractory metals. The primary goal is to improve throughput speed - achieve better uniformity - and simplify maintenance and crucible refilling. The system should feature a state-of-the-art main chamber setup with a single wafer handler and load-lock. Additionally - the system should be equipped with an ion beam source for reactive ion beam assisted deposition and sample cleaning. # Description of current situation Currently - we have a dated open-load evaporation system with...